The publication presents the ResiScope module, a dynamic current and conductivity measurement tool integrated into atomic force microscopy (AFM). By enhancing Current Sensing AFM (CSAFM), ResiScope enables simultaneous topographic and electrical property mapping with unprecedented dynamic range and automatic calibration. It accommodates current ranges from 1 mA to 100 fA and resistance from 0.1 kΩ to 1 TΩ, outputting results in both linear and logarithmic scales.

Three application examples illustrate its utility. First, conductivity mapping of TiW films highlights grain-boundary phenomena. Second, resistivity imaging of SiGe heterostructures identifies material variations in semiconductor components. Finally, temperature-dependent conductivity in VO₂ films demonstrates its phase transition properties.

The ResiScope’s precision, dynamic range, and user-friendly calibration make it a versatile tool for analyzing electric properties across diverse materials and technologies, including thin films, polymers, and electronic devices.